Technology for Radio-Frequency Phononics
1 : femto
CNRS
Introduce some notions of microfabrication that may be used for phononic crystal fabrication
-
Basic notions on clean room processing.
-
I will heavily insist on patterning.
-
Some examples of subtractive and additive processes.
-
Scales and dimensions.
Try to present them in the context of:
-
Conventional SAW and BAW device fabrication.
-
RF phononic crystals.
-
- Présentation