Technology for Radio-Frequency Phononics
Sarah Benchabane  1@  
1 : femto
CNRS

Introduce some notions of microfabrication that may be used for phononic crystal fabrication

  • Basic notions on clean room processing.

  • I will heavily insist on patterning.

  • Some examples of subtractive and additive processes.

  • Scales and dimensions.

    Try to present them in the context of:

    • Conventional SAW and BAW device fabrication.

    • RF phononic crystals.



  • Présentation
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